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101-204--010

Resolution in X and Z axis : 0,002 μm Resolution at stylus tip : 0,003 μm Measuring range vertical (Z axis) : 225 mm Measuring range horizontal (X axis) : 225 mm Accuracy : +/- (0,5 + L/100)μm

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101-206-001

Resolution in X and Z axis : 0,02 μm Resolution at stylus tip : 0,03 μm Measuring range vertical (Z axis) : 225 mm Measuring range horizontal (X axis) : 225 mm Accuracy : +/- (1,5 + L/100)μm

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