Resolution in X and Z axis : 0,02 μm
Resolution at stylus tip : 0,03 μm
Measuring range vertical (Z axis) : 225 mm
Measuring range horizontal (X axis) : 225 mm
Accuracy : +/- (1,5 + L/100)μm
Resolution in X and Z axis : 0,002 μm
Resolution at stylus tip : 0,003 μm
Measuring range vertical (Z axis) : 225 mm
Measuring range horizontal (X axis) : 225 mm
Accuracy : +/- (0,5 + L/100)μm
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